![]() Reduced moduli of coatings obtained by nanoindentation varied between 15 and 59 GPa and could be correlated with permeability to oxygen and water vapor through the existence of porosity in a broader sense. The composition ranged from oxygen-rich oxides with large silanol OH content to hybrid oxides with larger organic content, while refractive index varied from 1.45 to 1.5 depending on the specimen. The microstructure of SiO x coatings was analyzed using X-ray photoemission spectroscopy (XPS), nanoindentation, and spectroscopic ellipsometry. Plasma-enhanced chemical vapor deposition (PECVD) was used to deposit SiO x thin films of varying thicknesses on parylene C substrates, using hexamethyldisiloxane (HMDSO) as a precursor. 3Swiss Plasma Center (SPC), Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland.2Comelec SA, La Chaux-de-Fonds, Switzerland.1Laboratory for Processing of Advanced Composites (LPAC), Ecole Polytechnique Fédérale de Lausanne (EPFL), Lausanne, Switzerland. ![]() David Framil 1, Matthias Van Gompel 2, Florian Bourgeois 2, Ivo Furno 3 and Yves Leterrier 1 *
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